Development of a High-Resolution Active-matrix Electron Emitter Array for Application to High-Sensitivity Image Sensing

An active-matrix planar-type cold electron emitter array for application to high-sensitivity image sensors have been developed. A 640times480 pixel active-matrix HEED (high-efficiency electron emission device) with 20times20 mum pixels was fabricated, and the emission current density of 1 A/cm
²
has been obtained at an applied voltage of 23 V. Further studies toward the next generation image sensor with a high sensitivity are in progress