Spatially resolved plasma emission and absorption coefficient measurements by an optical fiber probe

The plasma emission and absorption coefficients were measured by means of two different techniques using an optical fiber probe in a parallel-plate RF glow discharges. The first technique can, in principle, provide three-dimensional resolution with the movement of the probe, while the second technique provides only a line-average measurement. The results of two different measurement methods and the practical limitations of the techniques are discussed.<
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