VNA Calset Port Augmentation for Impedance Matching Probe Calibration

A method for calibrating an on-wafer VNA measurement system with unequal port impedances determined by impedance matching probes is presented. The method starts with an existing stored calibration set for measurement reference planes at the ends of the coaxial cables. A new calibration set with a probe-tip reference plane is determined through a calibration set augmentation procedure using measured two-port normalized S-parameters of each probe.