Network Analyzer Calibration for Cryogenic On-Wafer Measurements

A cryogenic probe station for on-wafer microwave measurements has been developed at Sandia National Laboratories to explore basic device physics and characterize advanced components for low-temperature applications. The station was designed to operate over a temperature range of 20 to 300 K with a frequency range of DC to 50 GHz. Due to the vacuum and the low temperature environment, the use of microwave probes and the calibration of network analyzer measurements are somewhat elaborate. This paper presents guidelines for probe use and calibration in this environment.