Planar Impedance Standards and Accuracy Considerations in Vector Network Analysis

An equation is given for theoretical errors in oneport corrected vector S-parameter measurements (in any transmission media). The error analysis is used to investigate parasitics peculiar to planar impedance standards. Experimental results verify the error analysis, and show that parasitics as small as 5 pH are repeatably measurable. Application to GaAsFET measurements through 26 GHz is discussed.