Demonstration of Hybrid Al$_{x}$ Ga$_{1-x}$As–Polysilicon Microelectromechanical Tunable Filter

We report the experimental demonstration of a hybrid Al
_x
Ga
_1-x
As-polysilicon electrostatically actuated microelectromechanical systems (MEMS) tunable filter. An Al
_0.4
Ga
_0.6
As-GaAs distributed Bragg reflector was successfully flip-bonded to a polysilicon MEMS platform using SU-8 photoresist as bonding adhesive. The device demonstrated 53 nm (936.5-989.5 nm) of resonant wavelength tuning over the electrostatic actuation voltage range of 0-10 V