CMOS-Compatible Micromachined Toroid and Solenoid Inductors With High $Q$-Factors

We have fabricated high-quality-factor toroid and solenoid inductors using two copper-plating steps. The inductors exhibit Q-factors as high as 87 at 14.5 GHz and 35 at 6.4 GHz. The fabrication process is low in temperature and fully compatible with CMOS technology which makes it suitable for post-IC processing