CMOS Single-Photon Avalanche Diode Array for Time-Resolved Fluorescence Detection

A single photon avalanche diode detector for the analysis of fluorescence phenomena is presented. The 14-pixels array, fabricated in a conventional high voltage 0.35-mum CMOS technology, allows measuring photon densities as low as 10
⁸
photons/cm
²
s. Each 180times150-mum
²
pixel integrates a single photon avalanche diode combined with an active quenching circuit and a 17-bit digital events counter. On chip master logic provides the digital control phases required by the pixel array with a full programmability of the main timing synchronisms. Time-resolved measurements has been demonstrated by detecting a 10ns, 10pW (peak-power on the pixel) light pulse with a typical resolution of 80ps