Lumped behavioral modeling for suspended MEMS

A lumped behavioral model of suspended MEMS is presented in the paper. Suspended MEMS device is decomposed into many basal components, each of which is modeled using the relative movement theory and energy method, and its parameterized model coded in Verilog-A is realized. A system-level model of tuning fork gyroscope composed of functional components models is designed and simulated in SABER. Simulation of modal frequency of the gyroscope agrees to within 1% of FEM analysis. The result also indicates that transient analysis of complicated electro-mechanical coupled system is accomplished quickly in this way.