Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers

Low-loss silica-based single-mode waveguides and directional couplers are fabricated on silicon substrates. Their application to Mach-Zehnder interferometer type guided-wave devices is demonstrated. Optical switches or tunable optical couplers are fabricated using the thermooptic effect. Asymmetrical Mach-Zehnder interferometers are successfully applied to multi/demultiplexers for optical FDM transmission systems.<
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