Patterned Multipixel Membrane Mirror MEMS Optically Addressed Spatial Light Modulator With Megahertz Response

In this letter, we report the fabrication, modeling and characterization of an all-optically addressed spring patterned silicon-nitride deformable mirror microelectromechanical-systems device. Combinations of high-frequency ac and dc bias voltages are applied across the device. The experimental verified theoretical modeling for this device shows the mirror deflection saturation as a function of light intensity appropriate for the dynamic range compression deconvolution. Frequency response up to 10MHz, practical for correcting very fast turbulences, was measured