Compact Lumped Elements Micromachined Band-Pass Filters with Discrete Switching for 1.8/5.2 GHZ Applications

This paper presents the design, fabrication and first experimental results of a dual-band switchable band-pass filter structure for the selection of DCS 1800 and WLAN standards. The design approach makes use of intensive electromagnetic modelling and layout optimisation. The fabrication technology is based on bulk and surface silicon micromachining to manufacture lumped elements on high resistivity silicon bulk and dielectric membrane. Filter test structures were fabricated and their frequency responses are presented