Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever

In this paper, we are going to present a model of spring constant and pull down voltage for non uniform RF MEMS cantilever. In order to reduce the pull down voltage, it is usual to use a beam, which is narrower close to anchor and wider at the end or electrode area for a cantilever. Compare to uniform beam, this beam have lower spring constant which reduce the pull down voltage. A comprehensive model for spring constant and pull down voltage of the nonuniform cantilever is developed through basic force deflection mechanism of the suspended beam