Deposition and Characterization of TCO Films for the Application in GaAs Solar Cells

Electrical and optical properties of a double layer anode contact structure comprising metal grid and TCO (Transparent Conducting Oxide) film was investigated. In this double layer anode contact structure, TCO film acts as a bottom layer of the double layer AR-coating to reduce light reflection as well as an ohmic contact layer on p-GaAs to reduce parasitic series resistance. Temperature dependent studies on electrical and optical characteristics of AZO film were carried out. And the influence of this double layer anode contacts on solar cell device performance is also presented