Design, Simulation, and Fabrication of an On-Chip Antenna Fabricated Using Silicon Micromachining for Broad-Band Millimeter-Wave Wireless Communications

Design, simulation, and fabrication of a broadband coplanar-waveguide (CPW)-fed on-chip antenna is presented. The antenna is of slot type and has the shape of a bow-tie with rounded truncation. The antenna is designed for unlicensed 60 GHz band, i.e., 58-64 GHz for millimeter-wave (mm-wave) communications. To maximize the radiation efficiency of the antenna, the authors have used bulk micromachining method for low-resistivity silicon. Simulation results of the antenna using 3D finite integral techniques are presented