Planar High-Q Microresonators for Chip-Scale Integrated Silicon Photonics

In this paper we present fabrication and characterization of high Q microdisk resonators on a silicon-on-insulator (SOI) platform. We also present the planar integration of the input/output coupling waveguides with the microdisk resonator. The effect of substrate leakage loss is evaluated by comparing the performance of resonator-on-substrate versus undercut type resonators. Detailed measurements of Q and nonlinear response using lock-in technique with amplitude and phase response for both resonator structures is presented