Separate Determination of Liquid Properties with Lamb Wave Devices

Microacoustic sensors can be employed to measure physical, chemical and biological liquid properties. Among these sensors the potentially most sensitive is the Lamb wave device. The device is influenced by the mechanical and electrical properties of the liquid layer. Additionally, these effects on the device usually couple together. In this paper, considering the measuring of ideal nonviscous liquid, utilizing the partial wave analysis method, we give theoretical derivation and numerical simulation of three-channel Lamb wave devices for separate determination of liquid density and permittivity. Furthermore, using lithium niobate material as an example, according to sensitivity together with excitation efficiency, the optimization of the devices in singly and doubly rotated cuts for separate liquid properties sensing is presented.