An Automatic MEMS Testing System based on Computer Microvision

Measurement of the microelectromechanical systems (MEMS) is critical for device design, simulation and material property characterization. According to the requirement of MEMS test, we have developed tools for in situ measurement of characteristics of MEMS based on computer microvision. The method uses video imaging under continuous illumination, and it can be applied to the geometry and in-plane motion measurement of MEMS. The magnitude of the displacement is obtained with blur image synthesis technique and high measure accuracy can be achieved with sub- pixel location technique. In this paper, a study on measurement of a microresonator is presented. From the experiment results it can be seen that this system can measure motions of MEMS with nanometer resolution.