Design and Numerical Stress Analysis of Silicon Membrane Hibachi Windows

A silicon membrane windows is developed for a KrF laser system. The main function of the windows is to pass electron beam into the laser cell and to hold pressurized gas in the cell. 150 micro-meter thick silicon windows successfully survived from heated electron beam bombardment and shows 80% of electron beam transmission rate. The single silicon windows endured 250,000 cycles of electron beam shots. The arrayed windows did not show sufficient performance due to excessive heat generation. To enhance the longevity, the cooling system has to be improved and a study of the arc generated by the cathode is necessary