Extreme pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

The influence of external static forces on the SAW velocity is computed in a case of circular plates (membranes). Pressure and radial in-plane stress sensitivities of the SAW velocity at any point on the surface of thin membrane as a function of /spl alpha/-quartz crystal anisotropy are presented by sensitivity contour mapping from two independent variables. Direction of the SAW propagation and cut angles of /spl alpha/-quartz substrate. Both pressure loading and radial inplane symmetrical force loading theoretical sensitivity values are compared with experimental ones in the case of circular (membrane) plates. Both experimental and theoretical results are in good agreement.<
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