Controlled dissolution applied to berlinite and quartz materials

Conditions of good controlled dissolution of berlinite and quartz have been found for two different plate orientations: AT and SC cuts. Chemical lapping of berlinite AT-cuts has been developed in acid media, and that of AT- and SC-cuts has been developed in basic solvents. Conditions have been specified for both materials which result in a good surface state and a thickness defined by the required frequency. Piezoelectric characteristics of resonators made from controlled dissolution and from ionic beam etching are compared.<>