Graduate laboratory courses in microelectronics

An overview is given of specific laboratory objectives for the Master's degree program of the Department of Electrical Engineering at the State University of New York, Binghamton. The program is a combination of a three-credit project and three one-credit graduate laboratory courses. Emphasis is on the laboratory course requirements in the microelectronics area. The five laboratory courses in the microelectronics group are described. The experiments outlined represent current capability and are determined to some degree by the equipment now available. Time commitments are set for the one-credit load by analogy with undergraduate laboratories. Topic covered by the laboratory classes are: IC fabrication, semiconductor device testing, thick film hybrids, thin film deposition techniques and MOS VLSI design.<
>