Microminiature thermionic vacuum tube diodes

Details on the fabrication and testing of microminiature thermionic vacuum tube devices (i.e., diodes, triodes) with ultra-small (i.e., micron-scale) dimensions will be presented. The microminiature thermionic vacuum (MTV) devices can either have a direct or indirect heated cathode with an air-bridge filament supplying the thermal energy. Single device element architecture can consist of either a totally vertical structure or a combination of planar and vertical structures. The MTV devices are well suited to harsh environments and have the potential to operate at frequencies approaching the terahertz range.<
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