An aluminum nitride package for 300/spl deg/C operation

There has long been a need for electronics that can operate at high temperatures. Applications that could make use of 300/spl deg/C packages include deep well drilling sensors and the direct mounting of packages to high temperature engines of all types. Only recently have IC chips been developed that can survive continuous operating temperatures up to 300/spl deg/C. Unfortunately, current packaging technology cannot handle these high temperatures. This paper will detail a packaging technique that will survive continuous operating temperatures up to 300/spl deg/C.<
>