Quasi static analysis of hybrid and monolithic integrated circuits interconnections

Integrated-circuit interconnections are analyzed in quasi-static mode using the method of lines. The coupling capacitances are determined for monolithic and hybrid structures having parallel multiconductors at two different dielectric layer interfaces. The anisotropy effects on the coupling between crossing conductors are investigated for different dimensions of strip width and substrate thickness. The anisotropy effect on the couplings increases with wider strips and thinner substrates. The coupling capacitances are also investigated for parallel conductors on an isotropic substrate. For parallel coplanar conductors the couplings increase with closer strips and thicker substrates, while for conductors on different interfaces the coupling capacitance increases for wider strips and thinner substrates. The number of strips affects the couplings for thicker dielectric substrates.<
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