Annealing behavior of magnetic anisotropy in CoNbZr films

The effect of magnetic and nonmagnetic annealing on the magnetic anisotropy in CoNbZr films, formed by a DC opposing-targets sputtering method, was investigated. It was revealed that the origin of the magnetic anisotropy is the directional ordering of the magnetic atoms. The anisotropy fields and the direction of the easy axis obtained when the films are annealed in zero magnetic field are almost the same as those for the magnetic field parallel to the easy axis of the as-deposited films. When the films are annealed in a magnetic field perpendicular to the easy axis, the anisotropy field induced in parallel with the magnetic field, H/sub k/(t), is well represented by the following formula: ln (1-H/sub k/(t)/H/sub k/( infinity ) varies as - square root Tt, where H/sub k/( infinity ) is the thermal equilibrium value of the anisotropy field and D is the diffusion constant. The activation energy of the as-deposited film is 0.86 eV. Annealing the film increases the activation energy which is 2.1 eV when the film is annealed at a temperature of 450 degrees C for 2 h.<
>