A modular 1 mu m CMOS single polysilicon EPROM PLD technology

The authors describe a single-polysilicon CMOS process that has been optimized for the production of high-speed programmable logic devices (PLDs). The process departs from conventional approaches in two respects: it is a modular addition to a standard CMOS logic process, and it uses a single-polysilicon EPROM cell. The technology has been used to fabricate a 22F10 PLD with an access time of 9.0 ns. Snap-back has been identified as the major cause of program disturb.<
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