Vertical cavity surface emitting lasers with 21% efficiency by metalorganic vapor phase epitaxy

Proton implanted, vertical cavity top-surface emitting lasers exhibit the highest single-mode and multi-mode output powers, highest power conversion efficiency, and lowest threshold voltage for such devices reported to date. These lasers use new mirror grading designs that are enabled by metalorganic vapor phase epitaxy's capabilities of alloy grading and carbon doping. The results validate this growth technology by exceeding the previous best results which were based on molecular beam epitaxy.<
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