An experimental 16-Mbit CMOS DRAM chip with a 100-MHz serial read/write mode

A 5-V 4M-word*4-b dynamic RAM (random-access memory) with a 100-MHz serial read/write mode using 0.7- mu m triple-tub CMOS technology is discussed. The RAM utilizes a recently developed STT (stacked trench capacitor) cell which achieved 37 fF in a small cell size of 1.7*3.6 mu m/sup 2/. The STD (sidewall transistor with double-doped drain) structure is used for PMOS-FETs to realize high-speed operation. To ensure MOSFET reliability, the 5-V external supply voltage is converted to a 4-V internal supply voltage by an on-chip voltage converter circuit. An on-chip interleaved circuit and double-input-buffer scheme is used to realize high-speed serial read/write operation. Using an external 5-V power supply, the RAM achieved a 100-MHz serial access cycle, and RAS access time is 70 ns. The typical active current is 120 mA at a 190-ns cycle time.<
>