A novel trench-defined MISIM CCD structure for X-ray imaging and other applications

A charge-coupled device (CCD) utilizing a trench-defined metal-insulator-semiconductor-insulator-metal (MISIM) sandwich structure is proposed and analyzed. The CCD features high charge capacity and a deep photogenerated carrier collection depth. The trench CCD structure has potential application in X-ray imaging as well as in high-density visible and infrared imaging.<
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