Automatic ellipsometry measurement for anisotropic materials

A novel variable-medium and variable-angle ellipsometry (VMAE) system which is able to make measurements on anisotropic materials is described. A rotating analyzer ellipsometer operates with a variable angle of the laser beam, a variable azimuth of the sample, etc. Using this approach, equations for anisotropic bulk materials and thin films are obtained. The variable equations for the calculation of the optical constants of anisotropic materials can be solved by a PC-type computer combining the Powell, Rosenbrock, and Palmer direct optimization methods. The software structure is described. Experimental results are compared with theoretical values to test the reliability of the system.<
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