Chemically prepared Pb(Zr,Ti)O/sub 3/ thin films: the effects of orientation and stress

The effects of orientation and stress on chemically prepared Pb(Zr,Ti)O/sub 3/ (PZT) film properties have been determined. Systematic modification of the underlying substrate technology has made it possible to fabricate suites of films that have various degrees of orientation at a constant stress level, and to fabricate films that are in different states of stress but have similar orientation. Highly oriented films of the following compositions have been fabricated: PZT 60/40, PZT 40/60, and PZT 20/80. Remanent polarizations ( approximately=60 mu C/cm/sup 2/) greater than those of the best bulk polycrystalline ferroelectrics were obtained for PZT 40/60 films that were under compression and highly