110-GHz, 50%-efficiency mushroom-mesa waveguide p-i-n photodiode for a 1.55-μm wavelength

A mushroom-mesa structure is proposed to reduce the CR-time constant which originates from the waveguide photodiode structure. Experimental results at a 1.55-μm wavelength show that the multimode waveguide p-i-n photodiode with mushroom-mesa structure has an electrical 3-dB bandwidth of more than 75 GHz in the frequency domain and an electrical 3-dB bandwidth of 110 GHz in the time domain. The external quantum efficiency is 50% or 0.63 A/W, which leads to a record bandwidth-efficiency product of 55 GHz for long wavelength p-i-n photodetectors.