Nanofluid handling by micro-flow-sensor based on drag force measurements

A micro-flow-sensor for fluids is reported. The flow sensor operates over the 5-500- mu L/min range, allowing the detection of minute volumes, down to nanoliter resolution. The sensing principle is the measurement of the drag exerted by the fluid onto an obstacle, a cantilever beam having overall dimensions of 0.03 mm*1 mm*3 mm. The sensor chip is manufactured with micro-machining technologies, requiring a set of six masks.<
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