AESOP: a simulation-based knowledge system for CMOS process diagnosis

The AESOP system is a prototype computer tool designed to provide the automatic analysis and diagnosis of process deviations through electrical measurements on specific test structures. Causal relations necessary for diagnosis were determined through extensive use of numerical simulation for the CMOS process investigated with this prototype. The use of physics-based numerical simulators complements the previous approach of experimental knowledge engineering to determine these relations. Interaction with the user is facilitated in the AESOP system through the use of customized window-based editors and bit-mapped graphics. The abilities and limitations of the AESOP prototype are demonstrated on several sets of end-of-line test data.<
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