The effect of annealing on moment density and phase formations in Fe-N films

Fe-N films are prepared by argon-nitrogen reactive RF sputtering at a total pressure of 6 mTorr, an argon flow rate of 100 standard cubic centimeters per minute (sccm) and a nitrogen flow rate R of 0 to 30 sccm. For Ror=12%) are observed. For R=30 sccm, no phase changes are observed at all annealing temperatures and the moment is found to be constant ( Delta sigma /sub s/>