Disposable blood pressure sensors with digital on-chop laser trimming

A monolithic silicon pressure sensor with laser-trimmable calibration networks was developed for disposable use in invasive blood pressure monitoring. Laser trimming of the novel quasidigital on-chip resistor networks brings improved performance and short trim times for high production volumes. Incorporation of a small, square diaphragm for pressure sensing provides exceptionally high overpressure capability (10000 mm Hg), while the ability to laser-trim after packaging eliminates error associated with packaged-induced stresses. The chip offers low cost and high performance and is suitable for a variety of packages.<
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