A new refractory self-aligned gate technology for GaAs microwave power FETs and MMICs

The authors fabricated GaAs power FETs and microwave ICs using a novel fully planar, refractory self-aligned gate process. This process uses methods to reduce the gate resistance and output conductance without sacrificing simplicity. Because it is compatible with the use of an optical stepper, the process is suitable for manufacturing use. The C-band RF performance is excellent; the very uniform and reproducible device parameters resulted in a first-iteration 2.5-W C-band power amplifier that met design specifications on the first lot of wafers processed.<
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