Thin film dielectric deposition by rapid thermal CVD for InP device applications

Rapid thermal chemical vapor deposition (CVD) was utilized to deposit silicon-based dielectric on InP at high temperature. Silicon oxynitride films can be deposited on InP at 750 degrees C with deposition rates at high as 100 AA/s. The composition of the films can be varied continuously with the oxidant gas flow rate from silicon dioxide to silicon nitride. With this process the substate is not degraded and the films are of device quality. A highly sensitive optical set-up has been developed to measure the tension in a dielectric P/In structure and thus to determine the stoichiometry of the SiO/sub x/N/sub y/ film which leaves the structure unstressed.<
>