Analysis of slow-wave transmission lines on multi-layered semiconductor structures including conductor loss

Metal lines on semiconductor devices and circuits sometimes show slow-wave phenomena. To determine signal transmission characteristics along the lines, the typical assumption that metal is perfectly conducting is not always valid. A simple and accurate means is used here to include metallic loss in spectral domain analysis of planar transmission lines built on multilayer semiconducting media. Experimental results with a modulation-doped field-effect transistor (MODFET) structure and comparison with the calculations are presented.<
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