Silicon detectors for charged particles manufactured by conventional planar technology

Two types of detectors were developed by conventional planar technology: a p/sup +/-n-n/sup +/ ion-implanted detector and a n/sup +/p-p/sup +/ diffused detector. There was no observable difference in the quality of the detectors manufactured in this way. Both detectors were investigated for alpha and beta spectroscopy and exhibited good energy resolution. With an additional deposition of a /sup 6/LiF converter layer the detectors can be used for detection of neutrons.<
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