Processing and properties of sol-gel derived lithium niobate thin-layers

Sol-gel processing was investigated as a method of deposition for lithium niobate thin layers on a variety of substrates, including silicon, platinum, and sapphire. The influence of solution chemistry and thermal processing conditions on microstructure developed was studied especially for the integration of LiNbO/sub 3/ on Si. An ethanol-based system gave dense layers with grain sizes ranging between 0.1 and 0.2 mu m. Methoxyethanol-based systems also produced dense layers, but the grain sizes were somewhat larger, approaching 0.5 mu m. Electrical properties are reported for LiNbO/sub 3/ on Pt. The layers had preferred orientation, with values of dielectric constant and loss tangent of 22 and 0.005, respectively, at 25 degrees C and 1 MHz.<
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