A micro membrane pump with electrostatic actuation

A bulk micromachined membrane pump with outer dimensions of 7 mm*7 mm*2 mm and electrostatic actuation is presented. The micropump consists of four silicon chips, which form two passive check valves, a pump membrane and a counterelectrode for electrostatic actuation. Direct electrostatic forces are used for the deflection of the pump membrane, which has an area of 4 mm*4 mm and a thickness of 25 mu m. The liquid to be pumped is not subjected to any electrical field. The separation between the movable membrane and the electrically isolated stator is 4 mu m.<
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