Functional plasma-polymerized thin films prepared by a new type of reactor

A novel gas-flow type reactor for plasma polymerization was developed to synthesize functional polymers which enhance the reaction of radicals activated in the discharge. Styrene was used for the polymerization. The molecular structure and the molecular weight distribution were studied. The polymer was evaluated as an electron beam resist. The sensitivity of the film formed by the new reactor was higher than the reported values and a fine pattern was successfully developed in the resist by a wet process.<
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