Repairing power shorts in WSI circuits using infra-red imaging and laser cutting

An efficient approach to implement a defect tolerant power distribution network suitable for WSI (wafer scale integration) circuits was proposed by M. W. Yung and M. J. Little (1991). The design of the power distribution network has been incorporated into the wafer-scale circuit wafers designed for Hughes 3-D Computer. Experimental results from test structures and practical experience in locating and repairing power shorts on these wafers are discussed.<
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