Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics

We present a single-crystal-silicon (SCS) continuous membrane deformable minor array with applications as a corrective adaptive optics element for space-based telescopes. The continuous membrane is made from a thin silicon-on-insulator (SOI) layer with good optical surface quality. The membrane is able to deform locally by 125 nm at 100 V with a resonance frequency of 25 kHz