A Miniature Michelson Interferometer using Vertical Bragg Mirrors on SOI

A Michelson interferometer utilizing silicon Bragg reflectors is presented for the first time. The Bragg mirrors as well as the beam splitter are all realized at the same DRIE step, and occupy an area of 150 mumtimes150 mum. To the best of the authors' knowledge this the smallest reported foot print of the interferometer. The fabricated interferometer and measured characteristics are presented