Light injection in SOI microwaveguides using high-efficiency grating couplers

An experimental characterization of the grating couplers for sub-micrometer silicon-on-insulator (SOI) waveguides is presented. The grating couplers have been designed, realized, and characterized for the +1 diffraction order at an operating wavelength of 1.31 /spl mu/m for TE polarization. At the resonant angle, a coupling efficiency higher than 55% has been measured. The angular coupling range and the wavelength tolerance have been evaluated to 3/spl deg/ and 20 nm, respectively. The grating coupler is followed by a taper, and about 50% of the input power at 1.31 /spl mu/m is coupled into sub-micrometer rib and strip SOI waveguides. The ration between light power decoupled toward the cladding and light power decoupled toward the substrate is about three.