Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure

Summary form only given. The measurement of electromagnetic field of radio frequency induction thermal plasmas and their distribution characteristics are not well known because of their high temperature, which reaches at a value of about 10000 K or more. In this research, the magnetic field of radio frequency (0.5-2 MHz) thermal plasmas generated by inductively coupled plasma (ICP) technique at atmospheric pressure range are measured using a magnetic pick-up coil. The distributions of magnetic fields are also estimated by using a simple induction plasma model, and the calculated results are compared with those of the experimental ones. A distribution of measured magnetic field corresponds to an electrical conductivity of 7500 S/m is found to be a good agreement with that of the experimental results