Coupling efficiency control of vertically coupled microring resonator filter by microactuator

Coupling efficiency control of vertically coupled microring resonator was successfully realized by microactuator, which is suitable for the simultaneous integration of microelectromechanical systems switch and thermooptic tunable filter. The extinction ratio of drop port response of 15.1 dB, through port response of 2.1 dB, and switching time of 60 mus were demonstrated at the applied voltage of 350 V. The loss of through port response in the off-state was reduced to 0.8 dB